Nor-Cal Products – Specialized Valves and components for high vacuum

Nor-Cal Products – Specialized Valves and components for high vacuum

The Intellisys Throttling Valve line offers the highest performance available in downstream pressure control systems. DSP powered technology coupled with closed loop motor control provides very high speed actuation and fine position control. The adaptive pressure control algorithm inherent to all Intellisys products allows for optimized performance during changes in pressure, gas mixture ,temperature or flow. Intellisys technology is available in Pendulum, Gate or Butterfly valve configurations and sizes ranging from 1" ID to 14" ID. Thermostatic or PID controlled heater jackets are also available for the complete line of Intellisys throttling valves.

Genesis modular vacuum valves offer the most compact footprint available for downstream vacuum valves. Nippleless valve bodies and block fittings can be assembled by two attachment methods providing semiconductor tool designers with complex manifold configurations in a minimum space. Simple and robust, the Genesis valves are rated at 1 million cycles before service. Sizes range from 3/4" ID to 4" ID. To reduce particle contamination in loadlocks and process chambers, Genesis valves can be fitted with a patented, low cost, soft start actuator with no increase in size.

Heater Jackets, controllers and accessories reduce build up of semiconductor by-products in valves and other exhaust line components limiting particle generation and system downtime. Nor-Cal has a wide range of heater jackets in stock and fabricates custom made jackets to fit any shape omponent.